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Thin Films Laboratory website » Patents
PATENTS 
 
  
Halil Arslan, 2021
Yttrium monoxide/oxide thin film deposition by means of reactive DC magnetron sputtering
Application number: EP21208104.6

Andris Azens, Mārtiņš Zubkins, Edgars Butanovs, Juris Purāns, 2021
A method for reactive direct current magnetron sputtering deposition of gallium oxide thin films
Patent Number: LVP2021000105 

Mārtiņš Zubkins, Boris Poļakovs, Juris Purāns, Anatolijs Šarakovskis, 2021
A method for high power impulse magnetron sputtering deposition of rhenium oxide thin films
Patent Number: LVP2021000084 

J. Purāns, A. Āzens, M. Zubkins, 2020
A method for magnetron sputtering deposition of Zinc peroxide films at cryogenic temperature
Patent Number:  EP20020352.9

J. Purāns, A. Āzens , M. Zubkins, H.Arslan, 2020
Ierīce vakuuma pārklājumu izgatavošanai
Patent Number: LVP2020000040
Informāciju par pieteikumu: 

J. Purāns, M. Zubkins, V. Vibornijs, V. Skvorcova, 2020
Nanopārklājums ar anti-virālo, anti bakteriālo un pretraugu iedarbību
Patent Number: LVP2020000079

H. Arslan, 2020
Itrija monoksīda (YO) plāno kārtiņu uzklāšana ar reaktīvo līdzstrāvas magnetrono izputināšanu
Patent Number: LVP2020000090

J.Purans, 2015
Method and device for controlling reactive sputtering deposition
Patent Number: EP2881974-A1.
Inventor(s): J.Purans
 
J.Purans, 2015
Device and method for pvd process diagnostic using X-ray fluorescence local probe
Patent Number: EP2881973-A1
Inventor(s): J. Purans
J.Purans, 2015
Device and method for pvd process diagnostic using X-ray fluorescence local probe
Patent Number: EP2881973-A1
Inventor(s): J. Purans
D.Tonneau, J.Purans, C.Fauquet, F.Jandard, A.Erko, A.Bjeoumikov, 2013
Device for topographical characterisation and chemical mapping of surfaces
Patent Number: EP2577325
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